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    • 专利摘要:
    The invention relates to a coupling device (100) comprising, embedded in or on a substrate (110), a waveguide (121) capable of guiding a light beam centered on a central wavelength λ 0, and an optical coupler. The waveguide (121) and the optical coupler extend in two superposed stages (120, 130) of the coupling device. The optical coupler comprises at least one index gradient structure. The average optical index in the index gradient structure varies monotonically decreasing, as one moves away from the waveguide, the average optical index being an average optical index value in a cubic volume of side equal to: with neff the effective index of the guided mode in the waveguide (121; 421). The invention makes it possible to achieve an achromatic and polarization-insensitive optical coupling from and / or to an optical fiber.
    公开号:FR3071626A1
    申请号:FR1758885
    申请日:2017-09-26
    公开日:2019-03-29
    发明作者:Karim HASSAN；Salim BOUTAMI；Sylvie Menezo
    申请人:Commissariat a lEnergie Atomique CEA；Commissariat a lEnergie Atomique et aux Energies Alternatives CEA；
    IPC主号:
    专利说明:

    OPTICAL COUPLING DEVICE FOR A PHOTONIC CIRCUIT
    DESCRIPTION
    TECHNICAL AREA
    The invention relates to the field of injection and / or extraction of light, into and / or towards a waveguide integrated in or on a substrate.
    The invention relates in particular to an optical coupling between a photonic circuit and an optical fiber.
    PRIOR STATE OF THE ART
    The optical coupling between an optical fiber and a waveguide integrated on a substrate, conventionally uses a diffraction grating.
    The article by DirkTaillaert & al., "Grating Couplersfor Coupling between OpticalFibers and Nanophotonic Waveguides", Japanese Journal of Applied Physics, Vol. 45, No. 8A, 2006, pp. 6071-6077, describes an exemplary embodiment of such an optical coupling.
    This article describes a silicon structure, of constant thickness, which comprises a block of 12 μιτι wide, an adapter of decreasing width, and a nanophotonic waveguide, juxtaposed one after the other.
    The diffraction grating is engraved in the large block.
    The diffraction grating extends over approximately 70 nm in depth, in the thickness of the block, and has a period A = λ / η ^, where λ is the coupling wavelength and n e ^ the effective index of the guided mode in the waveguide.
    The diffraction grating makes it possible to extract the light out of the plane of the silicon structure, in a direction of coherent constructive interference which depends on the wavelength. The light thus extracted is injected into an optical fiber oriented almost as normal to the substrate. A reflector allows part of the extracted light to be redirected to the optical fiber towards the lower half-space.
    The article also teaches to slightly detune the diffraction grating to get rid of second order diffraction (apodization), generating reflection. The article illustrates in particular a diffraction grating having increasingly wider grooves as one approaches the waveguide.
    Such a structure makes it possible to obtain a bandwidth at 1 dB of 40 nm.
    An objective of the present invention is to increase the width of the passband of a coupling between a waveguide integrated in or on a substrate, and an external element such as an optical fiber.
    STATEMENT OF THE INVENTION
    This objective is achieved with a coupling device comprising a substrate (110) in or on which are integrated:
    a waveguide, capable of guiding a light beam centered on a central wavelength λο; and an optical injection and / or extraction coupler.
    According to the invention, the coupling device comprises, superimposed, a guide stage comprising the waveguide and a coupling stage comprising the optical coupler.
    The optical coupler comprises at least one index gradient structure.
    The average optical index in the index gradient structure varies monotonically decreasing in planes parallel to the plane of the substrate, as one moves away from the waveguide.
    The average optical index is defined as an average value of the optical index in a side cubic volume equal to:
    λ 0 * n e ff with n e ^ the effective index of the mode guided in the waveguide, said mean value being a quadratic mean of the optical indices of materials constituting said cubic volume, weighted by the volume proportion of each of these materials in the cubic volume.
    The optical coupler according to the invention performs out-of-plane coupling. In other words, it is able, in use, to deflect the axis of propagation of a light beam in order to inject it in a plane parallel to the substrate and / or extract it out of a plane parallel to the substrate. The light beam is more particularly injected and / or extracted from the waveguide.
    Throughout the text, the plane of the substrate designates a plane parallel to a lower face or an upper face of the substrate.
    The optical coupler cooperating with the waveguide, it is understood that it is capable of coupling a light beam centered on the same central wavelength λο.
    According to the invention, the optical coupler is not formed directly in the guide stage comprising the wave guide. Rather, it is formed in a coupling stage separate from the guide stage. The coupling stage and the guide stage are superimposed along an axis orthogonal to the plane of the substrate.
    According to the invention also, the optical coupler comprises at least one structure with an index gradient.
    In operation, a light beam centered on the wavelength A o circulates in the index gradient structure, along an optical path parallel to the longitudinal axis of the waveguide. The light beam then extends in turn in a succession of cubic volumes as defined above.
    According to the invention, an average optical index of a cubic volume is defined as being a quadratic average of the optical indices of the materials constituting this cubic volume. Due to the particularly small dimensions of the cube, the light is only sensitive in the cube to this average optical index.
    The variation of the average optical index in the index gradient structure then makes it possible to deflect the light beam circulating in the index gradient structure, and thus to achieve the desired optical coupling.
    In other words, according to the invention, the beam deflection at the origin of the optical coupling does not use diffraction phenomena, but a beam deflection phenomenon by progressive modification of a local index value optical.
    The inventors have shown that the optical coupling device according to the invention allows access to greater spectral coupling widths than in the prior art.
    In addition, the beam deflection principle implemented in the invention makes it possible to improve the efficiency of a coupling with an optical fiber situated above the coupling device, in particular when the optical fiber is oriented according to a axis normal to the plane of the substrate.
    Indeed, with a diffraction grating according to the prior art, the light with normal incidence, injected into the coupling device, is distributed equitably along two optical paths of opposite directions, only one of them leading to the waveguide . On the contrary, in the invention, the asymmetrical structure allows the light with normal incidence, injected into the coupling device, to be coupled in a single direction.
    This effect is advantageous, since an alignment of the optical fiber along the normal to the substrate can be achieved with better alignment accuracy than an alignment along an axis inclined relative to this normal. This alignment precision improves the control of the centering of a coupled spectral band.
    Finally, the beam deflection principle implemented in the invention makes it possible to extract the light towards a single half-space, outside the optical coupling device according to the invention. We can thus get rid of a deflection mirror.
    The coupling device according to the invention preferably has the following characteristics:
    the index gradient structure consists of at least a first and at least a second region, respectively made of a first material having a first optical index, and of a second material having a second optical index greater than the first index optics; and the proportion of the second material in said cubic volume varies monotonically decreasing in planes parallel to the plane of the substrate, as one moves away from the waveguide.
    Advantageously, the proportion of the second material in said cubic volume also varies linearly in planes parallel to the plane of the substrate, as one moves away from the waveguide.
    The coupling device according to the invention can have the following characteristics:
    the index gradient structure consists of an alternation of said first and second regions, distributed one after the other along an axis parallel to the longitudinal axis of the waveguide;
    a center to center distance between two second neighboring regions, along an axis parallel to the longitudinal axis of the waveguide, is less than or equal to - 2 -.
    2 * n //
    Said first and second regions each preferably have the shape of a rectangular parallelepiped.
    The coupling device according to the invention preferably has the following characteristics:
    the guide stage comprises, juxtaposed along the longitudinal axis of the waveguide, the waveguide, an adapter whose width decreases as it approaches the waveguide, and a block of constant width; and the optical coupler and the pad are superimposed together.
    As a variant, the coupling device according to the invention can have the following characteristics:
    the guide stage comprises, juxtaposed along the longitudinal axis of the waveguide, the waveguide, and an adapter whose width decreases as it approaches the waveguide;
    the optical coupler and the adapter are superimposed together; and said first and second regions are delimited with respect to one another by planes orthogonal to the plane of the substrate, with a curved section in planes parallel to the plane of the substrate.
    Preferably, the coupling device further comprises an intermediate layer, with an optical index lower than that of the waveguide, interposed between the guide stage and the optical coupler.
    The index gradient structure can be invariant depending on its thickness, the thickness being defined along an axis orthogonal to the plane of the substrate.
    Alternatively, one can have the following characteristics:
    the index gradient structure consists of a plurality of layers, identical to each other, and superimposed along an axis orthogonal to the plane of the substrate;
    each of said layers is invariant according to its thickness, the thickness being defined along an axis orthogonal to the plane of the substrate; and said layers are misaligned with respect to each other.
    The index gradient structure advantageously has a greater thickness
    Λ or equal to ——, the thickness being defined along an axis orthogonal to the plane of the substrate. n eff
    The coupling device according to the invention may further comprise a first reflector, disposed on the side of the optical coupler opposite to the guide stage.
    The coupling device according to the invention may further comprise a second reflector, disposed on the same side of the optical coupler as the guide stage.
    The optical coupler can comprise several index gradient structures, juxtaposed one after the other along an axis parallel to the longitudinal axis of the waveguide.
    The invention also relates to a method of manufacturing a coupling device according to the invention, in which the at least one index gradient structure is produced using several successive cycles of:
    deposition of a support layer;
    etching of through openings in the support layer; then filling the engraved openings with filling material and planarization.
    BRIEF DESCRIPTION OF THE DRAWINGS
    The present invention will be better understood on reading the description of exemplary embodiments given purely by way of non-limiting indication, with reference to the appended drawings in which:
    - Figures IA to IC schematically illustrate a first embodiment of a coupling device according to the invention;
    - Figure 2 schematically illustrates a second embodiment of a coupling device according to the invention;
    - Figures 3A and 3B illustrate simulation results of a coupling implemented in the coupling device of Figure 2;
    - Figure 4 schematically illustrates a third embodiment of a coupling device according to the invention;
    - Figure 5 schematically illustrates a variant of the device of Figure 2;
    - Figures 6 and 7 schematically illustrate a fourth and a fifth embodiment of a coupling device according to the invention;
    - Figures 8A and 8B schematically illustrate a method of manufacturing a coupling device according to the invention;
    - Figure 9 illustrates the coupling device obtained using the method of Figures 8A and 8B; and
    - Figures 10A and 10B schematically illustrate, in top view, other embodiments of a gradient index structure according to the invention.
    DETAILED PRESENTATION OF PARTICULAR EMBODIMENTS
    The axes have been shown the axes of an orthonormal reference frame (Oxyz).
    Throughout the text, the thickness designates the dimension along the axis (Oz), the width designates the dimension along the axis (Oy), and the length designates the dimension along the axis (Ox).
    Figures IA, IB and IC schematically illustrate a first embodiment of a coupling device 100 according to the invention, respectively in a perspective view, in a sectional view in a plane (xOz), and in a sectional view in a plane (xOy).
    The coupling device according to the invention comprises a substrate 110, delimited vertically by an upper face 110A and a lower face 110B, parallel to the plane (xOy). The upper 110A and lower 110B faces here form the largest faces of the substrate 110.
    The substrate 110 here has a shape of a rectangular parallelepiped.
    It consists here of silica (S1O2).
    The coupling device 100 also includes a guide stage 120, and a coupling stage 130.
    The substrate 110, the guide stage 120 and the coupling stage 130 are superimposed together along the axis (Oz), orthogonal to the plane (xOy). Here, the guide stage 120 is arranged between the substrate 110 and the coupling stage 130. Here, the guide stage 120 extends in direct physical contact with the coupling stage 130.
    The guide stage 120 is delimited vertically by two faces parallel to the plane (xOy).
    The guide stage 120 comprises a structure 12A, delimited vertically by two faces parallel to the plane (xOy), and of the same thickness as the guide stage 120.
    Structure 12A, known as high index, comprises juxtaposed one after the other along the axis (Ox), a waveguide 121 of nanophotonic waveguide type, an adapter 122, and a block 123 (see figures IA and IC).
    The term “waveguide” is used here only for the region of the waveguide core, of high index.
    The waveguide 121 is adapted to guide a light beam centered on a central wavelength λο.
    Here it presents a constant square or rectangular section in planes parallel to (yOz).
    Its largest dimension is parallel to the axis (Ox), and defines its longitudinal axis 1211. The longitudinal axis 1211 corresponds to the direction of propagation of the light in the waveguide 121.
    It is not excluded that the waveguide 121 forms a portion of a larger waveguide.
    Block 123 has a width much greater than that of waveguide 121.
    The block 123 has for example a width greater than 10 μm, while the waveguide 121 has a width less than or equal to 1 μm.
    The block 123 is made here, advantageously but optionally, of the same material as the waveguide 121.
    The adapter 122, better known under the term "typing", is located between the waveguide 121 and the block 123, in direct physical contact with one and the other. It is an adiabatic adapter.
    The adapter 122 is made here, advantageously but optionally, of the same material as the waveguide 121.
    It has a decreasing width along the axis (Ox), from a first end on the side of block 123, to a second end on the side of the waveguide
    121. Preferably, its width decreases from a width equal to that of the block 123, to a width equal to that of the waveguide 121.
    Block 123 and adapter 122 together perform an adiabatic mode adaptation of the mode guided in the waveguide. These are elements known from the prior art.
    The structure 12A here consists of silicon (Si).
    In the guide stage 120, the structure 12A is surrounded by two low index regions 12B, with an optical index lower than that of the structure 12A (or, where appropriate, the respective optical indices of the waveguide 121, of adapter 122 and block 123).
    Throughout the text, the optical indices are defined at the wavelength A o .
    Preferably, the low index regions 12B are made of the same material as the layer directly adjacent to the guide stage, on the side opposite to the coupling stage (here the substrate 110).
    Here, the two low index regions 12B are made of silica.
    To facilitate understanding of the invention, the two low index regions 12B are shown in transparency in FIG. 1A.
    According to variants not shown, the low index regions 12B may include different zones made of different materials, or even cavities filled with a vacuum or a gas.
    Next, the coupling stage 130 is described.
    The coupling stage 130 is delimited vertically by two faces parallel to the plane (xOy).
    The coupling stage 130 incorporates an optical coupler 13A.
    The optical coupler 13A is delimited vertically by two faces parallel to the plane (xOy), and extends vertically over the entire thickness of the coupling stage 130.
    The optical coupler 13A is able to perform an optical coupling of injection and / or extraction to and / or from the waveguide. Injection designates the injection of a light beam in a plane parallel to the plane (xOy), more particularly in the waveguide 121, here via the block 123 and the adapter 122. The extraction designates the extraction of a light beam outside a plane parallel to the plane (xOy), more particularly outside the waveguide 121, here via the adapter 122 and the block 123.
    Here, the optical coupler 13A consists of a gradient index structure 139, here consisting of alternation, along an axis parallel to (Ox), first regions 131 and second regions 132 (see figures IA and IB).
    The first and second regions 131, 3132 each extend here over the entire width of the index gradient structure 139.
    The first regions 131 completely fill the spaces between the second regions.
    The first regions 131 have an optical index lower than that of the second regions 132.
    Preferably, the second regions have an optical index close to that of the structure 12A of the guide stage, for example to within 20%.
    The second regions 132 can be made of the same material as the structure 12A of the guide stage, here silicon.
    Alternatively, they can be made of a different material. For example, the structure 12A is made of silicon, and the second regions 132 are made of amorphous silicon.
    The first regions 131 are preferably made of the same material as the low index regions 12B of the guide stage, here silica.
    To make it easier to read FIG. 1A, the first regions 131 are shown therein in transparency.
    The remainder of the coupling stage 130 is filled with a low index layer 13B, with an optical index lower than that of the structure 12A. The low index layer 13B preferably consists of the same material as the low index regions 12B of the guide stage, here silica.
    The waveguide 121 is thus entirely surrounded by a material of lower index, acting as a sheath. In particular, the substrate 110 here forms a lower sheath for the waveguide 121, the low index regions 12B form lateral sheaths, and the low index layer 13B forms an upper sheath. Here, the waveguide 121 is made of silicon surrounded by silica. It is suitable for guiding a light beam centered on a wavelength A o = 1550 nm.
    Next, the gradient gradient structure 139 is described in detail.
    Here, the index gradient structure 139 is superimposed on block 123 of the guide stage, along an axis parallel to (Oz). It extends here in direct physical contact with block 123.
    It has the shape of a rectangular parallelepiped, delimited vertically by two faces parallel to the planes (xOy). It preferably has the same width as the block 123, along the axis (Oy). It extends here over the entire length of the block 123, along the axis (Ox).
    Here, the second regions 132 have the shape of rectangular parallelepipeds, which each extend over the entire width of the index gradient structure. Their larger faces extend in planes parallel to (yOz), and are called "entry and exit faces". The input and output faces are therefore orthogonal to the longitudinal axis of the waveguide.
    Here, the first and second regions each extend over the entire thickness of the guide stage, along the axis (Oz). The gradient index structure 139 therefore has an invariance along this axis (Oz).
    We note d, a center-to-center distance between two second regions 132 directly neighboring throughout the gradient index structure 139.
    This distance d is defined along an axis 133, parallel to the longitudinal axis of the waveguide 121, parallel to the axis (Ox).
    This distance d checks:
    (1) with n e ^ the effective index of the mode guided in the waveguide 121, in operation, and
    A o the central wavelength of the waveguide 121 is adapted to guide.
    As a reminder, the effective index of a mode guided in a waveguide is defined as follows:
    (2) with A 0 the central wavelength of the light beam propagating in the waveguide and β the phase constant of the waveguide.
    β depends on the wavelength and on the mode of the light beam propagating in the waveguide, as well as on the properties of this waveguide (in particular refractive indices and geometry).
    β is defined by: A (x) = A (0) exp (yx), where x is an abscissa along a propagation path in the waveguide, A (x) is the complex amplitude as a function of x d ' a light beam propagating in the waveguide, and β is the imaginary part of γ.
    We can sometimes consider that the effective index designates the average optical index of the medium as it is "seen" by a mode of the light beam propagating in the waveguide. Therefore, in practice, equation (1) can be approximated by:
    with n c the optical index of the waveguide 121.
    In practice, the distance d is at least less than half the wavelength λ 0 , and preferably less than or equal to a quarter of λ 0 .
    Here, the distance d remains constant throughout the gradient index structure 139.
    On the other hand, the second regions 132 have lengths which vary along the axis 133, parallel to (Ox).
    The index gradient structure 139 thus forms a pseudo-periodic structure, of step d.
    The length of the second regions 132 varies monotonically decreasing along the axis 133, away from the waveguide 121.
    In a complementary manner, the length of the first regions 131 varies monotonically increasing along the axis 133, away from the waveguide 121.
    In other words, the ratio between the length of a second region 132, on the one hand, and the sum of the lengths of said second region and an adjacent first region 131, on the other hand, varies monotonously decreasing as it moves away from the waveguide, along the axis 133. Among the first two regions 131 adjacent to a second region 132, we consider for example the first region 131 furthest from the waveguide 121.
    Said ratio can also be defined as a ratio between the length of a second region and the length of a pseudo-period of the index gradient structure.
    Preferably, the monotonic variation is also linear.
    In operation, a light beam centered on the wavelength A o circulates in the index gradient structure 139, successively crossing the first and second regions.
    This light beam is oriented according to a vector one of the components of which is parallel to the axis (Ox).
    The condition over the distance da means that this light beam at λ 0 is not diffracted by the index jumps. He only "sees" local values with an average optical index.
    Each local value of the average optical index is defined in a cubic volume V (x, y, z) of side equal to - 2 -, centered on a point of coordinates (x, y, z) in the ^ * n eff gradient index structure. Each point of the optical path of the light beam in the index gradient structure therefore corresponds to a specific value of the average optical index, seen by the light beam.
    The average refractive index n avg in the cubic volume V (x, y, z) is:
    (4) with f nl the proportion of the material of the first regions in said cubic volume (between 0 and 1), n x the optical index of the first regions, and n 2 the optical index of the second regions of the gradient structure d 'index.
    In operation, the light coming from the waveguide 121 will leak towards the gradient index structure 139, the latter having an optical index close to that of the waveguide, on the side of the latter.
    Then, the light propagates in the index gradient structure 139, along an optical path having a component along the axis (Ox) and a component along the axis (Oy).
    The length of the second regions 132 varies monotonically decreasing along the axis 133, away from the waveguide 121.
    Consequently, the proportion of the material of the second regions 132 in a cubic volume V (x, y, z) varies monotonically decreasing, moving away from the waveguide, along the axis 133.
    Consequently, the average optical index in a cubic volume V (x, y, z) also varies monotonically decreasing, moving away from the waveguide, along the axis 133. This index gradient deflects the light by bending it, the wave front being slowed down on the side of the waveguide, in the index gradient structure. In particular, the local slope of a light ray propagating in the structure 139 varies progressively along the axis 133.
    Obviously, the same condition is satisfied, along each axis parallel to axis 133, passing through the index gradient structure, and on which we can center a series of cubic volumes V (x, y, z) of side equal to - 2 -.
    ^ * n eff
    The same condition is therefore verified along each of the axes corresponding to the orthogonal projection, in a plane (xOy) parallel to the plane of the substrate, of one of the rays of the beam propagating in the index gradient structure.
    The deflection of light in the index gradient structure increases with the value of said gradient, and with the thickness of said structure. These two parameters make it possible to adjust the direction of light extraction, for example to adapt it to the orientation of an optical fiber above the index gradient structure.
    During the injection, the rays follow the same path in the other direction, so that the advantages of the invention are found both for injection and for extraction of light.
    FIG. 1B shows schematically the path of extraction of a light beam, outside of the coupling device 100, here towards an optical fiber 110.
    The optical fiber 110 here extends along an axis substantially normal to the plane of the substrate, that is to say normal to the plane (xOy). It is advantageously inclined a few degrees relative to the normal to the plane of the substrate, for example less than 10 °.
    The invention is not however limited to such an orientation of the optical fiber, which can extend above the substrate while being more strongly inclined relative to the normal to the plane of the substrate. This relaxes the constraints on the index gradient in the index gradient structure, and on the thickness of said structure.
    The coupling device 100 makes it possible to limit a spectral dispersion linked to the injection and / or extraction, in comparison with the optical couplers of the prior art. In particular, an extraction angle remains constant over a broad spectral band of 200 nm. This low spectral dispersion is of particular interest, particularly in the field of optical telecommunications, where it is desired to encode the information over several wavelengths. The invention makes it possible in particular to use a single optical fiber to receive and / or inject different wavelengths.
    The coupling device 100 also offers a coupling insensitive to polarization.
    Finally, the coupling device 100 does not require the addition of a reflector to extract the light in a single half-space.
    The low spectral dispersion observed by the inventors can be explained as follows.
    We note a (A) the angle of deflection of the light, when entering the index gradient structure 139 from the guide stage.
    We have aa (A) = tan -1 (/ ——-- 1), with n c the optical index of the waveguide, and \ n eff W / n effW the effective index of the mode guided in the guide wave.
    Consequently, when the wavelength increases, <z (Â) increases, because the effective index of the mode guided in the waveguide decreases by delocalization. In other words, the vertical component (according to (Oz)) of the wave vector increases upon entry into the structure 139.
    At the same time, when the wavelength increases, the optical thickness of the gradient according to (Oz) seen by light decreases. This results in a decrease in the deflection of radii, 0 (Â), linked to the crossing of the gradient index structure 139. We have in particular 0 (Â) = tan -1 (ji * y * with the gradient along (Ox) of the average optical index in the index gradient structure 139.
    The initial increase in the deviation, at the entrance to the structure 139, is therefore compensated by the decrease in the deviation, during the crossing of said structure. Thus, the total deviation remains substantially constant, over a wide range of wavelengths.
    The same phenomenon occurs when the light rays move in the other direction, for an injection of light into the waveguide.
    FIG. 2 schematically illustrates a second embodiment of a coupling device 200 according to the invention.
    The coupling device 200 differs from the coupling device 100 only in that it further comprises an intermediate layer 240, disposed between the guide stage 220 and the coupling stage 230, in direct physical contact with these latter.
    The interlayer 240 has an optical index lower than that of the waveguide. Preferably, the intermediate layer 240 is made of the same material as the layer directly adjacent to the guide stage (here the substrate 210). Here, the interlayer 240 is made of silica.
    The thickness of the interlayer 240, along the axis (Oz), is less than the wavelength A o guided in the waveguide. The light can thus propagate by evanescence through the intermediate layer 240, between the coupling stage and the guide stage.
    The intermediate layer 240 makes it possible to control a length of leakage of a light beam extracted from the waveguide, this length of leakage determining the width of the beam extracted at the output of the coupling device 200.
    The same phenomenon occurs when the light rays move in the other direction, for an injection of light into the waveguide. It is thus possible to adapt the width of the extracted beam to a mode size in the optical fiber, during an extraction of the waveguide towards an optical fiber as represented in FIG. 1B, and during an injection of light from the optical fiber to the waveguide.
    In practice, the size of the guided mode in the optical fiber is an input data.
    It is desired that this mode size is equal to the length of leak, in the intermediate layer 240. A thickness of intermediate layer 240 is therefore determined, making it possible to obtain the desired length of leak.
    The leakage length fixes a maximum value of the index gradient in the index gradient structure 239, the light having to leak over this entire length. It must in fact be ensured that this gradient is sufficiently low for the mean optical index at each point of the gradient gradient structure 239 to remain greater than n e tf over the entire length of leak desired, thus allowing the leak from light.
    This maximum value of the gradient is preferably chosen, which makes it possible to limit the thickness of the structure with an index gradient, along the axis (Oz).
    We can then adjust the thickness of the index gradient structure, to adapt the extraction angle to the inclination of an optical fiber as shown in Figure IB.
    FIGS. 3A and 3B illustrate results of simulation of the operation of a coupling device as shown in FIG. 2.
    The central wavelength A o here is 1.55 μm.
    The distance d (see Figure IB) is 200 nm.
    The thickness of the interlayer is 0.35 µm.
    The index gradient structure has a thickness of 5 µm.
    The length of the first regions varies linearly and away from the waveguide, from a length of 50 nm to a length of 150 nm. The length of the second regions therefore varies in the opposite direction, also linearly.
    The coupled wavelength is varied around λ 0 , from 1.45 pm to 1.65 pm, ie a spectral bandwidth of 200 nm.
    In FIG. 3A, the extraction angle β is shown in solid lines, in degrees of angle, as a function of the wavelength λ, in pm.
    β remains substantially constant over the entire spectral band considered. In other words, an achromatic operation of the coupling device according to the invention is observed, here on a spectral band 200 nm wide. The coupling device according to the invention therefore allows the coupling of a wide spectral band, here at least 200 nm wide, towards the same direction in the free space outside the guide stage.
    For comparison, there is also shown, in dotted lines, the extraction angle as a function of the wavelength, in a device of the prior art as described in the introduction. The device of the prior art here comprises a diffraction grating having a pitch of 0.9 μm, consisting half of silicon and half of silica. It also includes a deflection mirror, at a quarter-wave optical distance from the network.
    In the device of the prior art, the extraction angle varies greatly as a function of the wavelength (variation of approximately 10 ° of the extraction angle for a variation of wavelength of approximately 50 nm).
    The invention therefore offers significantly improved performance in comparison with the prior art, in terms of stability of the extraction angle as a function of the wavelength.
    Polarization influences, like wavelength, the wave vector components of light in the index gradient structure. The invention therefore also offers significantly improved performance in comparison with the prior art, in terms of stability of the extraction angle as a function of the polarization. The coupling device according to the invention is insensitive to polarization.
    The same advantages are found when the light rays move in the other direction, for an injection of light into the waveguide.
    The simulations also showed that a linear variation of the lengths of the second regions of the index gradient structure makes it possible to obtain a spatial extraction profile of the quasi-Gaussian mode, and therefore a good mode adaptation with an optical fiber. .
    More generally, a linear variation as a function of x, of the proportion of the material of the second regions in a cubic volume V (x, y, z), makes it possible to obtain a spatial profile of extraction of the quasi-Gaussian mode, and therefore a good mode adaptation with an optical fiber.
    In FIG. 3B, the efficiency of the coupling between the coupling device according to the invention and an optical fiber is shown, as a function of the wavelength, in pm (curve 30i). The extraction angle is fixed.
    The coupling rate remains substantially constant, at a high value (around 90%), over the entire spectral band considered. The coupling device according to the invention therefore allows efficient coupling with an optical fiber in Gaussian mode. In addition, this coupling remains effective over a wide spectral band, here at least 200 nm wide,
    For comparison, the coupling rate as a function of the wavelength has also been shown in the device of the prior art described above (curve 3Ο2). In such a device, the extraction profile is exponential, and therefore ill-suited to the Gaussian profile of the mode in the optical fiber. There is a lower maximum coupling rate (at best 70%), which varies greatly depending on the wavelength.
    The invention therefore offers significantly improved performance compared to the prior art, in terms of coupling efficiency with a Gaussian mode optical fiber. The improvement is all the greater as the variation as a function of x, of the proportion of the material of the second regions in a cubic volume V (x, y, z), approaches a linear variation. The linear coefficient defining said variation in lengths notably determines the size of the Gaussian envelope, at the outlet of the coupling device according to the invention.
    It is assumed that the Gaussian extraction profile results from the fact that the linear variation of the proportion of the material of the second regions, does not result in a strictly linear variation of the value of the average optical index.
    In particular, according to equation (4) above, a linear variation of f nl does not translate into a linear variation of n av . The deflection of light in the gradient index structure is therefore accompanied by a slight defocusing effect.
    FIG. 4 schematically illustrates a third embodiment of a coupling device 400 according to the invention.
    Here, the guide stage has no block, and the gradient index structure 43A is superimposed with the adapter, along the axis (Oz). The adapter is in this case shorter than in the previous case of Figures IA to IC (it is not adiabatic, and lets the light diverge along the axis Oy).
    In Figure 4, there is shown a schematic view of the coupling device 400, in a plane parallel to the plane (xOy). FIG. 4 shows the waveguide 421, the lateral edges of the adapter, under the index gradient structure, and the index gradient structure 439, consisting of alternating first regions 431 and seconds regions 432.
    The gradient index structure 439 has the same section as the adapter, in planes parallel to (xOy).
    The second regions 432 have faces 432A, called input and output faces. In operation, these faces are crossed by the light beam coupled by the coupling device 400. These faces extend along (Oz), and have a curvature defined in planes parallel to (xOy). Said curvature here corresponds to a portion of ellipse.
    In other words, the first and second regions are delimited here by planes which extend along (Oz), and have a curvature defined in planes parallel to (xOy).
    The curvature is adapted to the shape of the wavefront of the beam propagating in the index gradient structure, when the latter is superimposed on a non-adiabatic adapter, which lets the light diverge. In other words, the shape of the first and second regions of the index gradient structure is adapted to the diverging wavefront at the output of the waveguide.
    Here, the average optical index in the index gradient structure varies in a decreasing monotonic manner, as one moves away from the waveguide, along each of the axes t t corresponding to the orthogonal projection , in a plane (xOy) parallel to the plane of the substrate, of one of the rays of the diverging beam propagating in the index gradient structure.
    FIG. 5 schematically illustrates a variant in which the coupling device 500 is obtained from a so-called SOI stack.
    The SOI stack, for silicon on insulator, comprises an insulating layer of silica 512, sandwiched between a substrate 511 of silicon and an upper layer of silicon.
    Here, the upper silicon layer is etched to form the silicon elements of the guide stage. The silicon elements of the coupling stage can be produced in a second SOI stack, added by bonding, or else in a layer deposited in amorphous silicon.
    As a variant, the upper silicon layer can be etched, to form both the silicon elements of the guide stage and the coupling stage, in order to produce a coupling device as shown in FIGS. 1A to 1C .
    So that a light beam can be sufficiently curved during its passage through the optical coupler according to the invention, it must pass through a thickness of the optical coupler at least equal to the thickness being defined according to (Oz) and n eff being the index n eff 11 effective of the mode guided in the waveguide.
    Consequently, the thickness H according to (Oz) of the index gradient structure and of the optical coupler checks:
    λ 0 n eff (5)
    Λ
    For the reasons explained above, this inequality can be approximated by H> -, n c with n c the optical index of the waveguide 121.
    For a coupling at 1550 nm, the height H is approximately 5 μm, while the length along (Ox) of the first regions of the index gradient structure drops, for example, to 50 nm, ie a ratio 100 between these two magnitudes.
    During manufacture, the index gradient structure can be produced by etching trenches in a solid layer. The report 100 mentioned above can then pose technological difficulties.
    Two embodiments are proposed in FIGS. 6 and 7, making it possible to reduce this ratio, by reducing the thickness of the optical coupler.
    The coupling device 600 of FIG. 6 comprises a first reflector 650, which extends in a plane parallel to (xOy), on the side of the optical coupler opposite to the guide stage 620.
    The reflector 650 reflects the rays around λ 0 .
    It consists for example of a simple layer of metal.
    FIG. 6 shows the path of the light in the optical coupler 63A. Thanks to the reflector 650, the light passes twice through the optical coupler 63A in the thickness direction. The apparent thickness of the optical coupler 63A is therefore twice its actual thickness. Light can thus pass through a thickness of the optical coupler at
    Λ less equal to ——, with a lesser real thickness of said coupler.
    n eff
    This embodiment can be produced from an SOI stack, returned after completion of the guide stage, of the coupling stage, and the deposition of a reflective layer. The substrate 610 is then a silicon substrate for example having been bonded above the reflective layer, and distinct from the silicon substrate of the SOI stack (removed at the end of the process). The coupling stage 630 then extends between the guide stage 620 and the substrate 610.
    The optical coupler 63A protrudes along the axis (Ox), relative to the high index structure of the guide stage. This avoids generating parasitic reflections.
    The coupling device 700 of FIG. 7 further comprises a second reflector 751, reflecting around λ 0 , and disposed in a plane parallel to (xOy), on the same side of the optical coupler as the guide stage 720.
    The optical coupler 73A here consists of several gradient index structures 739, juxtaposed along the axis (Ox). It is thus possible to combine a strong index gradient in the optical coupler, and a long length of the optical coupler along which the beam performs several round trips between the first reflector 750 and the second reflector 751.
    As a variant, the optical coupler consists of a single structure with an index gradient, having a lower index gradient.
    We then illustrate, with reference to FIGS. 8A and 8B, steps of a manufacturing method making it possible to easily obtain a high ratio between the height of the optical coupler, and the length along first regions of the index gradient structure. .
    The idea is to make the optical coupler in several layers, superimposed along the axis (Oz).
    In a first step, illustrated in FIG. 8A, a support layer 860, here made of amorphous silicon, is deposited above the substrate 810.
    Then, etching through openings in the support layer 860, to define a first series of second regions 832 according to the invention, and filling the etched openings with a filling material, here silica, which is planarized , to form a first series of first regions 831 according to the invention (see FIG. 8B).
    By repeating the steps of FIGS. 8A and 8B several times, a multilayer structure of desired thickness is obtained, and consisting of several superimposed series of first and second regions of monotonically variable lengths.
    This process makes it possible to benefit, at each etching step, from a favorable shape ratio between the depth of the etching and the section of the etched openings.
    Here, the support layer is made of the material of the second regions and the filling material is the material of the first regions. The reverse is also possible.
    FIG. 9 illustrates the coupling device 900 obtained using such a method. The optical coupler 93A consists of a plurality of layers 935 superimposed along the axis (Oz), and each comprising a series of first and second regions according to the invention.
    The different layers 935 have the same index gradient. They are preferably all identical. On the other hand, they are not necessarily perfectly aligned with one another according to (Ox), since the invention exploits at first order the gradient of the local value of an average optical index. The alignment tolerance is for example of the order of a few pseudo-periods, where the pseudo-period is the length in accordance (Ox) of a second region and of a first adjacent region.
    This embodiment can be combined with the use of one or more reflectors, as illustrated in FIGS. 6 and 7.
    The idea underlying the invention consists in making a coupling device, with an index gradient structure in which the average optical index, as defined above, varies monotonically along each of the axes t , corresponding to the orthogonal projection, in a plane (xOy) parallel to the plane of the substrate, of one of the rays of the beam propagating in the index gradient structure.
    The variation is monotonically decreasing as one moves away from the waveguide.
    A person skilled in the art will know how to produce numerous geometries, other than those described above, making it possible to verify this condition.
    Figures 10A and 10B illustrate two examples.
    In the embodiment of FIG. 10A, the gradient index structure 1039 consists of a full layer of high index material (second region 1032), in which inclusions of low index material extend (first regions 1031 ).
    The inclusions have the shape of a cylinder of revolution, the same height according to (Oz) as the gradient structure of index 1039. The diameter of the cylinders varies monotonically along the axis (Oz).
    Here, the cylinders are distributed in a plurality of regions RI, R2, R3, R4, each region being associated with a given value of the diameter of the cylinders. Each region RI, R2, R3, R4 has the shape of a rectangular parallelepiped, of shorter length or
    It can be considered that each of these regions RI, R2, R3, R4 is the equivalent of a pseudo-period of the index gradient structure described with reference to FIGS. 1A to 1C.
    In the embodiment of FIG. 10B, the variation of the average optical index along the axis (Ox), in planes parallel to the plane (xOy), is obtained by combining:
    - inclusions 2031 in the form of a cylinder of revolution in low index material, in a high index layer 2032;
    - rectangular parallelepipeds 3031, 3032 alternately in low index and high index material, of variable lengths; and
    - 4032 cylindrical inclusions with an oval base in high index material, in a low index layer 4031.
    The invention is not limited to the examples detailed above, and numerous variants can be implemented without departing from the scope of the invention.
    In the examples detailed below, the index gradient structure consists entirely of the first and second materials. Alternatively, it may include inclusions of a third material.
    We have detailed above a device suitable for coupling at 1550 nm, consisting of silicon and silica. As a variant, the coupling device can consist of silicon nitride (SiN) and silica, for coupling at 1550 nm. According to another variant, the coupling device can consist of SiGe and Si, for coupling in the infrared means, at a wavelength between 3 μm and 12 μm. The dimensions of the index gradient structure are then multiplied by a factor between 2 and 6, relative to the dimensions for a coupling at 1550 nm.
    权利要求:
    Claims (15)
    [1" id="c-fr-0001]
    1. Coupling device (100; 200; 400; 500; 600; 700; 900) comprising a substrate (110; 210; 511; 610; 810) in or on which are integrated:
    a waveguide (121; 421), capable of guiding a light beam centered on a central wavelength λ 0; and an optical injection and / or extraction coupler (13A; 63A; 73A; 93A);
    characterized in that the coupling device comprises, superimposed, a guide stage (120; 220; 520; 620; 720) comprising the waveguide and a coupling stage (130; 230; 630) comprising the optical coupler, in that the optical coupler comprises at least one index gradient structure (139; 239; 439; 739; 1039), and in that the average optical index in the index gradient structure varies in a decreasing monotonic manner in planes parallel to the plane of the substrate, as one moves away from the waveguide (121; 421), the average optical index being defined as an average value of the optical index in a cubic volume (V (x, y, z)) of side equal to:
    A o
    [2" id="c-fr-0002]
    2 * with the effective index of the mode guided in the waveguide (121; 421), said mean value being a quadratic mean of the optical indices of materials constituting said cubic volume, weighted by the volume proportion of each of these materials in cubic volume.
    2. Coupling device (100; 200; 400; 500; 600; 700; 900) according to claim 1, characterized in that:
    the index gradient structure (139; 239; 439; 739; 1039) consists of at least a first and at least a second region (131, 132; 431, 432; 831, 832; 1031,1032; 2031 , 3031, 4031, 2032, 3032,4032), respectively made of a first material having a first optical index, and of a second material having a second optical index greater than the first optical index; and the proportion of the second material in said cubic volume (V (x, y, z)) varies monotonically decreasing in planes parallel to the plane of the substrate, as one moves away from the guide wave (121; 421).
    [3" id="c-fr-0003]
    3. Coupling device (100; 200; 400; 500; 600; 700; 900) according to claim 2, characterized in that the proportion of the second material in said cubic volume (V (x, y, z)) varies in further linearly in planes parallel to the plane of the substrate, as one moves away from the waveguide (121; 421).
    [4" id="c-fr-0004]
    4. Coupling device (100; 200; 400; 500; 600; 700; 900) according to claim 2 or 3, characterized in that:
    the index gradient structure (139; 239; 439; 739) consists of an alternation of said first and second regions (131,132; 431, 432; 831, 832), distributed one after the other along d an axis parallel to the longitudinal axis of the waveguide;
    a center-to-center distance between two second neighboring regions (132; 432; 832), along an axis parallel to the longitudinal axis of the waveguide (121; 421), is
    Λ less than or equal to - 2 -.
    2 * n eff
    [5" id="c-fr-0005]
    5. Coupling device (100; 200; 500; 600; 700; 900) according to claim 4, characterized in that said first and second regions (131, 132; 831, 832) each have a shape of rectangular parallelepiped.
    [6" id="c-fr-0006]
    6. Coupling device (100; 200; 500; 600; 700; 900) according to claim 5, characterized in that:
    the guide stage (120; 220; 520; 620; 720) comprises, juxtaposed along the longitudinal axis (1211) of the waveguide, the waveguide (121), an adapter (122) of which the width decreases as it approaches the waveguide, and a block (123) of constant width; and the optical coupler (13A; 73A) and the pad (123) are superimposed together.
    [7" id="c-fr-0007]
    7. Coupling device (400) according to claim 4, characterized in that:
    the guide stage comprises, juxtaposed along the longitudinal axis of the waveguide, the waveguide (421), and an adapter whose width decreases as it approaches the waveguide;
    the optical coupler and the adapter are superimposed together; and said first and second regions (431, 432) are delimited relative to one another by planes orthogonal to the plane of the substrate, with curved section in planes parallel to the plane of the substrate.
    [8" id="c-fr-0008]
    8. Coupling device (200; 400; 500; 600; 700; 900) according to any one of claims 1 to 7, characterized in that it further comprises an intermediate layer (240), of lower optical index to that of the waveguide, sandwiched between the guide stage (220; 520; 620; 720) and the optical coupler (63A; 73A; 93A).
    [9" id="c-fr-0009]
    9. Coupling device (100; 200; 400; 500; 600; 700; 900) according to any one of claims 1 to 8, characterized in that the index gradient structure (139; 239; 439; 739 ; 1039) is invariant according to its thickness, the thickness being defined along an axis orthogonal to the plane of the substrate.
    [10" id="c-fr-0010]
    10. Coupling device (900) according to any one of claims 1 to 8, characterized in that:
    the index gradient structure consists of a plurality of layers (935), identical to each other, and superimposed along an axis orthogonal to the plane of the substrate; each of said layers (935) is invariant according to its thickness, the thickness being defined along an axis orthogonal to the plane of the substrate; and said layers (935) are misaligned with respect to each other.
    [11" id="c-fr-0011]
    11. Coupling device (100; 200; 400; 500; 900) according to any one of claims 1 to 10, characterized in that the index gradient structure (139; 239; 439; 1039; 1039 ') has a thickness greater than or equal to the thickness being n eff defined along an axis orthogonal to the plane of the substrate.
    [12" id="c-fr-0012]
    12. Coupling device (600; 700) according to any one of claims 1 to 10, characterized in that it further comprises a first reflector (650; 750), disposed on the side of the optical coupler (63A; 73A) opposite the guide stage.
    [13" id="c-fr-0013]
    13. Coupling device (700) according to claim 12, characterized in that it further comprises a second reflector (751), disposed on the same side of the optical coupler (73A) as the guide stage.
    [14" id="c-fr-0014]
    14. Coupling device (700) according to any one of claims 1 to 13, characterized in that the optical coupler (73A) comprises several gradient index structures (739), juxtaposed one after the other the along an axis parallel to the longitudinal axis of the waveguide.
    [15" id="c-fr-0015]
    15. A method of manufacturing a coupling device (900) according to any one of claims 1 to 14, characterized in that the at least one structure with an index gradient is produced using several successive cycles from:
    depositing a support layer (860);
    etching of through openings in the support layer; then filling the engraved openings with filling material and planarization.
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    同族专利:
    公开号 | 公开日
    EP3460547A1|2019-03-27|
    EP3460547B1|2021-12-15|
    US10302870B2|2019-05-28|
    US20190094467A1|2019-03-28|
    FR3071626B1|2019-11-01|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US20040156589A1|2003-02-11|2004-08-12|Luxtera, Inc|Optical waveguide grating coupler incorporating reflective optical elements and anti-reflection elements|
    US20140314374A1|2011-10-21|2014-10-23|David A. Fattal|Grating couplers with deep-groove non-uniform gratings|
    FR3027689A1|2014-10-24|2016-04-29|Tyco Electronics Corp|LUMINOUS COUPLING STRUCTURE AND OPTICAL DEVICE COMPRISING A NETWORK COUPLER|
    US6285813B1|1997-10-03|2001-09-04|Georgia Tech Research Corporation|Diffractive grating coupler and method|
    US7426328B2|2002-08-28|2008-09-16|Phosistor Technologies, Inc.|Varying refractive index optical medium using at least two materials with thicknesses less than a wavelength|
    US7412133B2|2005-09-28|2008-08-12|Electronics And Telecommunications Research Institute|Wavelength selective optical focusing device using optical fiber and optical module using the same|
    WO2011096895A1|2010-02-05|2011-08-11|Agency For Science, Technology And Research|A lens and a method of forming the same, a method of generating a refractive index profile for a lens and a photonic package|
    US9239507B2|2013-10-25|2016-01-19|Forelux Inc.|Grating based optical coupler|
    EP2887110A1|2013-12-20|2015-06-24|IMEC vzw|Integrated photonic coupler|
    US9435961B2|2014-10-15|2016-09-06|Huawei Technologies Co., Ltd.|Stacked photonic chip coupler for SOI chip-fiber coupling|
    US9547129B1|2015-01-21|2017-01-17|Inphi Corporation|Fiber coupler for silicon photonics|
    US9645320B2|2015-03-30|2017-05-09|Hisense Broadband Multimedia Technologies Co., Ltd.|Coupler and optical waveguide chip applying the coupler|
    KR20170034214A|2015-09-18|2017-03-28|삼성전자주식회사|Optical apparatus|
    CN107290824B|2016-04-13|2020-01-10|华为技术有限公司|Waveguide structure and preparation method|FR3056306B1|2016-09-20|2019-11-22|Commissariat A L'energie Atomique Et Aux Energies Alternatives|OPTICAL GUIDE HAVING A PSEUDO-GRADIENT INDEX RISE|
    FR3074587B1|2017-12-06|2020-01-03|Commissariat A L'energie Atomique Et Aux Energies Alternatives|PHOTONIC CHIP WITH OPTICAL PATH FOLDING AND INTEGRATED COLLIMATION STRUCTURE|
    JP2019117286A|2017-12-27|2019-07-18|ルネサスエレクトロニクス株式会社|Semiconductor device and manufacturing method thereof|
    FR3077652A1|2018-02-05|2019-08-09|Commissariat A L'energie Atomique Et Aux Energies Alternatives|PHOTONIC CHIP WITH INTEGRATED COLLIMATION STRUCTURE|
    FR3078835B1|2018-03-12|2020-04-17|Commissariat A L'energie Atomique Et Aux Energies Alternatives|PHOTONIC DEVICE COMPRISING A LASER OPTICALLY CONNECTED TO A SILICON WAVEGUIDE AND METHOD FOR MANUFACTURING SUCH A PHOTONIC DEVICE|
    FR3084481B1|2018-07-25|2021-07-23|Commissariat Energie Atomique|ATHERMAL MODULATOR-SWITCH WITH TWO SUPERIMPOSED RINGS|
    法律状态:
    2018-09-28| PLFP| Fee payment|Year of fee payment: 2 |
    2019-03-29| PLSC| Publication of the preliminary search report|Effective date: 20190329 |
    2019-09-30| PLFP| Fee payment|Year of fee payment: 3 |
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    2021-09-30| PLFP| Fee payment|Year of fee payment: 5 |
    优先权:
    申请号 | 申请日 | 专利标题
    FR1758885|2017-09-26|
    FR1758885A|FR3071626B1|2017-09-26|2017-09-26|OPTICAL COUPLING DEVICE FOR A PHOTONIC CIRCUIT.|FR1758885A| FR3071626B1|2017-09-26|2017-09-26|OPTICAL COUPLING DEVICE FOR A PHOTONIC CIRCUIT.|
    EP18196353.9A| EP3460547B1|2017-09-26|2018-09-24|Optical coupling device for a photonic circuit|
    US16/141,414| US10302870B2|2017-09-26|2018-09-25|Optical coupling device for a photonic circuit|
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